JPH0535558Y2 - - Google Patents

Info

Publication number
JPH0535558Y2
JPH0535558Y2 JP1984086855U JP8685584U JPH0535558Y2 JP H0535558 Y2 JPH0535558 Y2 JP H0535558Y2 JP 1984086855 U JP1984086855 U JP 1984086855U JP 8685584 U JP8685584 U JP 8685584U JP H0535558 Y2 JPH0535558 Y2 JP H0535558Y2
Authority
JP
Japan
Prior art keywords
electron
detector
secondary electron
electron beam
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1984086855U
Other languages
English (en)
Japanese (ja)
Other versions
JPS613662U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8685584U priority Critical patent/JPS613662U/ja
Publication of JPS613662U publication Critical patent/JPS613662U/ja
Application granted granted Critical
Publication of JPH0535558Y2 publication Critical patent/JPH0535558Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP8685584U 1984-06-12 1984-06-12 ２次電子検出装置 Granted JPS613662U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8685584U JPS613662U (ja) 1984-06-12 1984-06-12 ２次電子検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8685584U JPS613662U (ja) 1984-06-12 1984-06-12 ２次電子検出装置

Publications (2)

Publication Number Publication Date
JPS613662U JPS613662U (ja) 1986-01-10
JPH0535558Y2 true JPH0535558Y2 (en]) 1993-09-09

Family

ID=30638535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8685584U Granted JPS613662U (ja) 1984-06-12 1984-06-12 ２次電子検出装置

Country Status (1)

Country Link
JP (1) JPS613662U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0331956U (en]) * 1989-08-07 1991-03-28

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5514683A (en) * 1978-07-19 1980-02-01 Jeol Ltd Reflected electron detector for scan electronic microscope
JPS5568059A (en) * 1978-11-17 1980-05-22 Jeol Ltd Automatic position setter for reflective electron beam detector in scanning electronic microscope

Also Published As

Publication number Publication date
JPS613662U (ja) 1986-01-10

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